The Johns Hopkins Center for Systems Science in Engineering has time series data at the state and province level for some countries (US, China, Canada, Australia). They used to have county-level data for the US but no longer provide it. Unfortunately the case numbers are only confirmed + presumptive positive, so it's not everything you're asking for, but it seems like it gets close.
The Johns Hopkins Center for Systems Science in Engineering has time series data at the state and province level for some countries (US, China, Canada, Australia). They used to have county-level data for the US but no longer provide it. Unfortunately the case numbers are only confirmed + presumptive positive, so it's not everything you're asking for, but it seems like it gets close.
https://github.com/CSSEGISandData/COVID-19/tree/master/csse_covid_19_data/csse_covid_19_time_series